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Power Feedthrough
A device that supplies external power
to the
inside of the vacuum chamber
to the
inside of the vacuum chamber
A device that supplies power to the inside of the vacuum chamber.
It is suitable for vacuum equipment such as semiconductor
processing facilities,
particle accelerators, furnaces,
analysis equipment, and X-ray detection devices.
It is also an optimal device for high-temperature and
high-voltage devices
(electrode: molybdenum is used)
Features
-
- Both sealing and electrical insulation is provided for chamber walls
- Providing solutions for applications requiring airtightness and electrical isolation
- Electrode and length can be adjusted according to customer specifications
Application
-
Optimized for semiconductor processing facilities, particle accelerators, furnaces, analysis equipment, X-ray detection devices, high-temperature, high-voltage devices, etc. (electrode: molybdenum is used)
Specification
-
Specifications of currently manufactured products
-
Products can be tailored to customer needs
-
Material
item Material Electrode Molybdenum (Mo) Insulator Ceramic Housing Stainless steel
How to install
- Brazing
- Brazing
- ISO KF
Flange - ConFlat
Flange - NPT fitting
- 1” base
plate
Dimensions(mm)
